High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00148737
Contributor : Marie-Renée Friscourt <>
Submitted on : Wednesday, May 23, 2007 - 10:20:29 AM
Last modification on : Friday, November 16, 2018 - 4:28:04 PM

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  • HAL Id : hal-00148737, version 1

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D. Galayko, A. Kaiser, Bernard Legrand, C. Combi, D. Collard, et al.. High-frequency high-Q micro-mechanical resonators in thick epipoly technology with post-process gap adjustment. 2002, pp.665-668. ⟨hal-00148737⟩

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