Grazing incidence diffraction anomalous fine structure of self-assembled semiconductor nanostructures

S. Grenier , A. Letoublon , M.G. Proeitti , Hubert Renevier , L. Gonzalez , J.M. Garcia , C. Priester (1) , J. Garcia

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520

S. Grenier, A. Letoublon, M.G. Proeitti, Hubert Renevier, L. Gonzalez, et al.. Grazing incidence diffraction anomalous fine structure of self-assembled semiconductor nanostructures. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2003, 200, pp.24-33. ⟨hal-00146613⟩