Electrostatical coupling-spring for micro-mechanical filtering applications

Document type :
Conference papers
Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-00146403
Contributor : Marie-Renée Friscourt <>
Submitted on : Tuesday, May 15, 2007 - 8:30:36 AM
Last modification on : Thursday, October 18, 2018 - 1:21:08 AM

Identifiers

  • HAL Id : hal-00146403, version 1

Citation

D. Galayko, A. Kaiser, L. Buchaillot, D. Collard, C. Combi. Electrostatical coupling-spring for micro-mechanical filtering applications. 2003, pp.530-533. ⟨hal-00146403⟩

Share

Metrics

Record views

42