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Conference papers

Electrostatical coupling-spring for micro-mechanical filtering applications

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00146403
Contributor : Collection Iemn <>
Submitted on : Tuesday, May 15, 2007 - 8:30:36 AM
Last modification on : Monday, March 2, 2020 - 1:38:04 PM

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  • HAL Id : hal-00146403, version 1

Citation

D. Galayko, A. Kaiser, L. Buchaillot, D. Collard, C. Combi. Electrostatical coupling-spring for micro-mechanical filtering applications. 2003, pp.530-533. ⟨hal-00146403⟩

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