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Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators

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https://hal.archives-ouvertes.fr/hal-00125630
Contributor : Collection Iemn <>
Submitted on : Monday, January 22, 2007 - 10:27:51 AM
Last modification on : Monday, March 2, 2020 - 1:38:03 PM

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  • HAL Id : hal-00125630, version 1

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D. Galayko, A. Kaiser, Bernard Legrand, L. Buchaillot, D. Collard, et al.. Tunable passband T-filter electrostatically driven polysilicon micromechanical resonators. Sensors and Actuators A: Physical , Elsevier, 2005, 117, pp.115-120. ⟨hal-00125630⟩

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