Tool wear for micro-ultrasonic machining (MUSM)

Eric Andrey (1) , Jean-Jacques Boy (1) , Chantal Khan Malek (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Tool wears fast in MUSM. To quantify this wear, tests were conducted as a function of various parameters such as machine characteristics (static load on the workpiece, power supply on the piezoelectric transducer...) or tool material and abrasive grain.

Keywords: ultrasonic machining

Domains: Other; Micro and nanotechnologies/Microelectronics

Eric Andrey, Jean-Jacques Boy, Chantal Khan Malek. Tool wear for micro-ultrasonic machining (MUSM). 5th Int. Conf. European Society for precision Engineering and Nanotechnology, Montpellier, 8-11 mai 2005, Proc. EUSPEN 05, 2005, Montpellier, France. pp.345-348. ⟨hal-00108344⟩