Developments in micro-ultrasonic machining (Micro-USM)
Résumé
The MUSM technique exploits the ultrasonic frequency vibration of a tool to force abrasive grains to hit the workpiece material and erode its surface by a mechanism of fracture or cavitation. It is used for precise machining of high-aspect-ratio micro-structures into hard and brittle non-conducting materials, difficult to machine otherwise. After having recalled the principle of MUSM and described our machine, we report on experiments conducted on various materials such as silicon, glass, piezoelectric ceramics, quartz or other piezoelectric crystals, and sapphire. Machine and tool development is under way