Laser damage resistance of silica thin films deposited by electron beam deposition, ion assisted deposition, reactive low voltage ion plating and dual ion beam sputtering

Laurent Gallais (1) , Helene Krol (1) , Jean-Yves Natoli (1) , Mireille Commandre (1) , Michel Cathelinaud (1) , Luc Roussel (1) , Michel Lequime (1) , Claude Amra (1)

1 FRESNEL - Institut FRESNEL

Domaines: Optique [physics.optics]

Laurent Gallais, Helene Krol, Jean-Yves Natoli, Mireille Commandre, Michel Cathelinaud, et al.. Laser damage resistance of silica thin films deposited by electron beam deposition, ion assisted deposition, reactive low voltage ion plating and dual ion beam sputtering. Thin Solid Films, 2007, 515, pp.3830-3836. ⟨hal-00104671⟩