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Article Dans Une Revue Applied Surface Science Année : 2006

Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication

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hal-00089369 , version 1 (18-08-2006)

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  • HAL Id : hal-00089369 , version 1

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S. Coutanson, É. Fogarassy, J. Venturini. Mechanisms and application of the Excimer laser doping from spin-on glass sources for USJ fabrication. Applied Surface Science, 2006, 252, pp.4502-4505. ⟨hal-00089369⟩

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