XPS and NEXAFS characterisation of plasma deposited vertically aligned N-doped MWCNT

S. Point (1) , T. Minéa (1) , B. Bouchet-Fabre (2) , Agnès A. Granier (1) , G. Turban (1)

1 IMN - Institut des Matériaux Jean Rouxel
2 LFP - URA 2453 - Laboratoire Francis PERRIN

This paper is dedicated to carbon nanotubes grown by electron cyclotron resonance plasma-enhanced chemical vapour deposition. It has been shown that carbon nanotubes (CNTs) can be grown at temperature as low as 550 °C by this technique. X-ray photoelectron spectroscopy and near-edge X-ray absorption fine structure spectroscopy were used to analyse nitrogen-doped CNTs. Independently of the synthesis temperature, about 4 at.% nitrogen are incorporated in the CNTs. A good correlation was found between XPS and NEXAFS results. Four components (397.3, 398.5, 400.8 and 402.5 eV) compose N 1s XPS spectra related to different chemical environments of nitrogen. This interpretation can be used as a simple check method of the presence of CNTs on as-deposited PECVD samples.

Mots clés: Carbon Nanotube; PECVD; XPS; NEXAFS

Domaines: Chimie théorique et/ou physique

S. Point, T. Minéa, B. Bouchet-Fabre, Agnès A. Granier, G. Turban. XPS and NEXAFS characterisation of plasma deposited vertically aligned N-doped MWCNT. Diamond and Related Materials, 2005, 14, pp.891-895. ⟨10.1016/j.diamond.2004.10.011⟩. ⟨hal-00084699⟩