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Coplanar waveguides on dielectric membranes micromachined on GaAs substrate

Abstract : GaAs micromachining technology was used for fabricating coplanar transmission lines on Si3N4 and polyimide membranes deposited on GaAs substrates. On-wafer measurements of scattering parameters up to 75 GHz for several line configurations show a constant phase velocity of 2.9E8 m/s and a predominance of metallic losses with a square root frequency dependence.
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Contributor : Patrice Salzenstein <>
Submitted on : Wednesday, May 31, 2006 - 3:53:59 PM
Last modification on : Monday, March 2, 2020 - 1:38:06 PM
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  • HAL Id : hal-00076886, version 1


Patrice Salzenstein, Olivier Dupuis, Mohamed Helal, Eric Lheurette, Olivier Vanbésien, et al.. Coplanar waveguides on dielectric membranes micromachined on GaAs substrate. Electronics Letters, IET, 1996, 32, pp.821-822. ⟨hal-00076886⟩



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