Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie

Abstract : We present an experimental set-up that allows us to measure in-plane and out-ofplane displacement fields of surfaces in reflection microscopy. This set-up is based upon a Nomarski shear-interferometer, which is used with two different Wollaston prisms. The real topography of the object is deduced and divided into mean surface and roughness. The out-of-plane displacement field is obtained by difference of mean surfaces, while the in-plane displacement field is deduced from the cross-correlation of the roughness.
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https://hal.archives-ouvertes.fr/hal-00023349
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  • HAL Id : hal-00023349, version 1

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Fabien Amiot, François Hild, Jean Paul Roger. Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie. Instrumentation, Mesure, Métrologie, Lavoisier, 2005, 5, pp.33-43. ⟨hal-00023349⟩

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