An integrated debugging system based on E-beam test

I. Guiguet (1) , M. Marzouki (1) , B. Courtois (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

A data processing system, as part of a whole integrated test system for debugging VLSI circuits using a scanning electron microscope is described. A link between a CALMA description and the SEM images of a circuit is reported. This forms the basis of an expert system for fault diagnosis.

Mots clés: integrated-debugging-system; E-beam-test; data-processing-system; VLSI-circuits; scanning-electron-microscope

Domaines: Micro et nanotechnologies/Microélectronique

I. Guiguet, M. Marzouki, B. Courtois. An integrated debugging system based on E-beam test. Microelectronic Engineering, 1987, 7(2-4), pp.275-82. ⟨10.1016/S0167-9317(87)80022-9⟩. ⟨hal-00013414⟩