Fault modeling of electrostatic comb-drives for MEMS

B. Charlot (1) , S. Moussouris (1) , Salvador Mir (1) , B. Courtois (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

The work described in this paper is aimed at fault modeling and fault simulation of electrostatic comb-drives. At present, we have taken into account the most typical defects which we have encountered through fabrication of resonator test structures. These defects include stiction of the suspended beams to the substrate surface and the break of comb-drive model, and the impact of a faulty comb-drive is assessed for different resonator-based designs.

Mots clés: MEMS-; electrostatic-comb-drives; fault-modeling; fault-simulation; resonator-test-structures

Domaines: Micro et nanotechnologies/Microélectronique

B. Charlot, S. Moussouris, Salvador Mir, B. Courtois. Fault modeling of electrostatic comb-drives for MEMS. Design, Test, and Microfabrication of MEMS and MOEMS, 1999, Paris, France. pp.398-405. ⟨hal-00013030⟩