High Damping Electrostatic System For Vibration Energy Scavenging

Skandar Basrour (1, 2) , B. Charlot (1) , G. Despesse (3) , J.J. Chaillout (3) , I. Dekkaki (3) , T. Jager (3) , J.M. Leger (3) , A. Vassilev (3)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

We report here global simulations and designs of mechanical structures able to recover power over a large spectrum below 100 Hz. Contrary to existing structures tuned on a particular frequency, we have investigated conversion structures with low quality factors allowing power scavenging with a high electrical damping. MATLAB and Mathematica analytical models have been performed to determine the mechanical and electrical parameters that maximize the scavenged power for a wide number of applications. An electrostatic transduction is used to convert vibrations of the moving mass into electrical power.

Mots clés: global MEMS simulation; vibration; energy scavenging; electrostatique conversion

Domaines: Micro et nanotechnologies/Microélectronique

Skandar Basrour, B. Charlot, G. Despesse, J.J. Chaillout, I. Dekkaki, et al.. High Damping Electrostatic System For Vibration Energy Scavenging. Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, 2005, Anaheim, CA, United States. pp.375 - 378. ⟨hal-00009100⟩