From the MEMS idea to the MEMS product: CAD and foundries

J.M. Karam (1) , B. Courtois (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

Besides foundry facilities, computer-aided design (CAD) tools are also required to move microsystems from research prototypes to an industrial market. Currently available CAD tools need extensions before they can be used for the automated design of micromachined devices. This paper presents a low cost access to microsystem technology (MST), applied by the CMP service, and based on the use of existing microelectronics production lines, with additional post-processing for microsystem specific 2D and 3D structures, and a global CAD approach for the design and simulation of microsystems applied to currently available commercial CAD tools, e.g. Mentor Framework, in order to ensure a continuous flow from the design to the manufacturing.

Mots clés: MEMS; CAD; foundries; microsystems; automated-design; micromachined-devices; microsystem-technology; microelectronics-production-lines; post-processing; 3D-structures; 2D-structures; global-CAD-approach; simulation; commercial-CAD-tools; Mentor-Framework; continuous-flow

Domaines: Micro et nanotechnologies/Microélectronique

J.M. Karam, B. Courtois. From the MEMS idea to the MEMS product: CAD and foundries. Wescon'96 Conference, Oct 1996, Anaheim, CA United States. pp.73-78. ⟨hal-00007922⟩