MEMS Built-In-Self-Test Using MLS

Salvador Mir (1) , Libor Rufer (1) , A. Dhayni (1)

1 TIMA - Techniques de l'Informatique et de la Microélectronique pour l'Architecture des systèmes intégrés

This paper presents a Built-In-Self-Test (BIST) implementation of pseudo-random testing for Micro Electro-Mechanical Systems (MEMS). The technique is based on Impulse Response (IR) evaluation using Maximum-Length Sequences (MLS). We will demonstrate the use of this technique and move forward to find the signature that is defined as the necessary samples of the impulse response needed to carry out an efficient test. We will use Monte-Carlo simulations to find the set of all fault-free devices under test (DUT). This set defines the impulse response space and the signature space. A DUT will be judged fault-free according to its signature being inside or outside the boundaries of the signature space. Finally, the test quality will be evaluated as function of the probabilities of false acceptance and false rejection, yield and percentage of test escapes. According to these test metrics, the design parameters (length of the MLS and the precision of the analogue to digital converter ADC) will be derived.

Domaines: Micro et nanotechnologies/Microélectronique

Salvador Mir, Libor Rufer, A. Dhayni. MEMS Built-In-Self-Test Using MLS. European Test Symposium, Ninth IEEE (ETS'04), 2004, Ajaccio, France. pp.66-71, ⟨10.1109/ETSYM.2004.1347607⟩. ⟨hal-00005858⟩