Skip to Main content Skip to Navigation
Conference papers

Large Qxf Product for HBAR using Smart Cut (TM) transfer of LiNbO3 thin layers onto LiNbO3 substrate

Abstract : In this paper, we propose a novel approach for HBAR devices using the Smart Cut(TM) technology to obtain thin homogeneous X-cut single crystal films of LiNbO3. Sub-micron layers were successfully transferred onto LiNbO3 handle wafers. RF characterizations were performed around 1.95 GHz and quality factors in excess of 40 000 are extracted, proving the applicability of layer transfer by Smart Cut TM to acoustic devices. An excellent matching between simulations and experimental data as well as TCF measurements are presented in this paper
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-00486441
Contributor : Sarah Djaouti <>
Submitted on : Wednesday, May 12, 2021 - 4:34:19 PM
Last modification on : Wednesday, May 12, 2021 - 5:56:31 PM

File

Pijolat2008.pdf
Files produced by the author(s)

Licence


Distributed under a Creative Commons Attribution 4.0 International License

Identifiers

Citation

M. Pijolat, A. Reinhardt, E. Defaÿ, C. Deguet, D. Mercier, et al.. Large Qxf Product for HBAR using Smart Cut (TM) transfer of LiNbO3 thin layers onto LiNbO3 substrate. 2008 IEEE Ultrasonics Symposium, Nov 2008, Pékin, China. ⟨10.1109/ULTSYM.2008.0049⟩. ⟨hal-00486441⟩

Share

Metrics

Record views

462

Files downloads

18