Hybrid Optothermal-Magnetic Mobile Microgripper for in-liquid Micromanipulation
Résumé
In this paper, we propose a mobile microgripper actuated using laser optothermal and magnetic actuation in liquid environments. This hybrid actuation scheme allows the full decoupling between the in-plane positioning of the mobile microgripper and the actuation of its gripping mechanism, which reduces the control complexity of such microgrippers. The work is divided into three main parts: 1) The design and fabrication of an optothermally actuated microgripper using a spiral bimaterial microjoint. 2) The two dimensional positioning of the microgripper in the working area using magnetic fields generated by four electromagnets. 3) The two dimensional steering of the laser beam using a tip/tilt galvo mirror to optothermally actuate the gripping mechanism on demand. The developed mobile microgripper with the dimensions of 1500×700×250 µm can realize an open and close gripping motion of 35 µm, a magnetic positioning accuracy of 6 µm for translation over an area of 1×1 mm and 2°for rotation, and a laser steering accuracy of 25 µm. Finally, the mobile microgripper is used to control the position of a microbead inside a liquid environment. Our work provides a proof of concept of laser optothermalmagnetic hybrid actuation, which has the potential to enhance the deployment of microtools in biomedical applications including cell manipulation and lab-on-chip devices.
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