OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS

W. Claeys (1) , S. Dilhaire (1) , D. Lewis (1) , V. Quintard (1) , T. Phan (1) , J. L. Aucouturier (2)

1 CPMOH - Centre de physique moléculaire optique et hertzienne
2 IXL - Laboratoire d'études de l'intégration des composants et systèmes électroniques

The current which flows through the metal semiconductor interface of an ohmic contact produces a Peltier effect. This thermal effect has been optically detected and used for the development of an optical ammeter, the determination of doping type of semiconductors and the homogeneity scanning upon integrated circuits.

Domaines: Physique [physics]

W. Claeys, S. Dilhaire, D. Lewis, V. Quintard, T. Phan, et al.. OPTICAL AMMETER FOR INTEGRATED-CIRCUIT CHARACTERIZATION AND FAILURE ANALYSIS. Quality and Reliability Engineering International, 1995, 11 (4), pp.247-251. ⟨10.1002/qre.4680110406⟩. ⟨hal-01549895⟩