Phosphate structure and lithium environments in lithium phosphorus oxynitride amorphous thin films

Mercedes Alicia Carrillo Solano (1, 2) , Marc Dussauze (3) , Philippe Vinatier (1) , Laurence Croguennec (1) , Efstratios I. Kamitsos (4) , R. Hausbrand (2) , Wolfram Jaegermann (2)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux
2 Institut für Materialwissenschaft
3 ISM - Institut des Sciences Moléculaires
4 Theoretical and Physical Chemistry Institute

Lithium ion-conducting glasses attract wide interest for electrochemical applications like efficient energy storage devices. This work presents a structural study on involved bonding units, based on X-ray photoelectron spectroscopy and infrared spectroscopy, of lithium phosphorus oxide and oxynitride amorphous thin films prepared by RF magnetron sputtering. A thorough consideration of the mid- and far-infrared spectral regions demonstrated structural changes at the phosphate units and the lithium ion environments triggered by nitrogen incorporation and post-deposition thermal treatment. It was found that films prepared by sputtering in pure nitrogen atmosphere have about 75 % of their nitrogen atoms in sites doubly coordinated with phosphorus (P–N=P), and the rest in triply coordinated sites. It was shown also that nitrogen incorporation favors the stability of lithium ions, while annealing enhances ionic conductivity of the oxynitride films.

Mots clés: LiPON; IR spectroscopy; Thin film; Lithium phosphorus oxynitride; Glasses

Domaines: Matériaux

Mercedes Alicia Carrillo Solano, Marc Dussauze, Philippe Vinatier, Laurence Croguennec, Efstratios I. Kamitsos, et al.. Phosphate structure and lithium environments in lithium phosphorus oxynitride amorphous thin films. Ionics, 2016, 22 (4), pp.471-481. ⟨10.1007/s11581-015-1573-1⟩. ⟨hal-01294952⟩