Supercritical fluid chemical deposition as an alternative process to CVD for the surface modification of materials

Mélanie Majimel (1) , Samuel Marre (1) , Elsa Garrido (1) , Cyril Aymonier (1)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux

Taking the desirable attributes of CVD and aqueous plating techniques while minimizing the disadvantages of each, supercritical fluid chemical deposition (SFCD) demonstrates itself to be a promising process alternative to enable the fabrication of nanostructured devices. This paper gives information about the SFCD process for metal deposition as an alternative to CVD through various examples of inorganic deposition (films or nanostructures). In particular, the use of SFCD will be demonstrated for the surface modification of carbon nanotubes (CNTs) and their decoration with palladium nanoparticles.

Mots clés: Chemical deposition; Nanomaterials; Supercritical fluids; Surface modification

Domaines: Matériaux

Mélanie Majimel, Samuel Marre, Elsa Garrido, Cyril Aymonier. Supercritical fluid chemical deposition as an alternative process to CVD for the surface modification of materials. Chemical Vapor Deposition, 2011, 17 (10-12), pp.342-352. ⟨10.1002/cvde.201106921⟩. ⟨hal-00653329⟩