Characterization of all-solid-state Li/LiPONB/TiOS microbatteries produced at the pilot scale

Benoit Fleutot (1) , Brigitte Pecquenard (1) , Frédéric Le Cras (2) , Benjamin Delis (1) , Hervé Martinez (3) , Loic Dupont (4) , D. Guy-Bouyssou (5)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux
2 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
3 IPREM - Institut pluridisciplinaire de recherche sur l'environnement et les matériaux
4 LRCS - Laboratoire réactivité et chimie des solides - UMR CNRS 7314
5 ST-TOURS - STMicroelectronics [Tours]

All-solid-state Li/LiPONB/TiOS microbatteries were manufactured at the pilot scale on silicon substrate. In a first attempt, the characterization of the active materials constituting the microbattery was achieved in order to determine their accurate composition, structure and morphology. Finally, a thorough electrochemical characterization was carried out on all-solid-state cells. Excellent performances were noted in terms of cycle life (with more than 1000 cycles), efficiency and self-discharge (less than 5% per year). In addition, the positive electrode highlighted a high volumetric capacity close to 90 μAh cm⁻² μm⁻¹ when cycled at 100 μA cm⁻² between 1 V and 3 V vs. Li⁺/Li.

Mots clés: Lithium; Microbattery; Titanium oxysulfide; Thin films; LiPON

Domaines: Matériaux

Benoit Fleutot, Brigitte Pecquenard, Frédéric Le Cras, Benjamin Delis, Hervé Martinez, et al.. Characterization of all-solid-state Li/LiPONB/TiOS microbatteries produced at the pilot scale. Journal of Power Sources, 2011, 196 (23), pp.10289-10296. ⟨10.1016/j.jpowsour.2011.07.018⟩. ⟨hal-00633888⟩