Substantial reduction of the dielectric losses of Ba0.6Sr0.4TiO3 thin films using a SiO2 barrier layer

Vincent Reymond (1) , Dominique Michau (1) , Sandrine Payan (1) , Mario Maglione (1)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux

The efficient use of ferroelectric thin films in radio-frequency agile devices faces several limitations. One of them is imposed by the dielectric losses which are usually above 1%, i.e. above the threshold as set by the electronic industry. Following the same route as for bulk ceramics, we have processed composite stacks made of BST/SiO2 multilayers using radio-frequency magnetron sputtering...

Mots clés: Dielectric constant; Dielectric loss; Magnetron sputtering; Barium strontium titanium oxide; Silica; Physical properties

Domaines: Matériaux

Vincent Reymond, Dominique Michau, Sandrine Payan, Mario Maglione. Substantial reduction of the dielectric losses of Ba0.6Sr0.4TiO3 thin films using a SiO2 barrier layer. Journal of Physics: Condensed Matter, 2004, 16 (50), pp.9155-9162. ⟨10.1088/0953-8984/16/50/006⟩. ⟨hal-00160672⟩