Improving the dielectric losses of (Ba,Sr)TiO3 thin films using a SiO2 buffer layer

Vincent Reymond (1) , Dominique Michau (1) , Sandrine Payan (1) , Mario Maglione (1)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux

The efficient use of ferroelectric thin films in rF agile devices faces several limits. One of them is the dielectric losses which are usually above 1%, i.e. above the threshold as set by the electronic industry...

Mots clés: Dielectric properties; Silicon oxide; (Ba; Sr)TiO3

Domaines: Matériaux

Vincent Reymond, Dominique Michau, Sandrine Payan, Mario Maglione. Improving the dielectric losses of (Ba,Sr)TiO3 thin films using a SiO2 buffer layer. Ceramics International, 2004, 30 (7), pp.1085-1087. ⟨10.1016/j.ceramint.2003.12.024⟩. ⟨hal-00150332⟩