Elaboration by tape casting and hot rolling of copper/silicon carbide composite thin films for microelectronic applications

Pierre-Marie Geffroy (1) , Jean-François Silvain (1) , Thierry Chartier (2)

1 ICMCB - Institut de Chimie de la Matière Condensée de Bordeaux
2 Axe 1 : procédés céramiques

During the last decade, the use of metal matrix composites (MMCs) materials such as Al/SiC or CuW for microelectronic devices have made powder modules more reliable.

Mots clés: Thermal conductivity; Composites; Hot rolling; Tape casting; CTE

Domaines: Matériaux

Pierre-Marie Geffroy, Jean-François Silvain, Thierry Chartier. Elaboration by tape casting and hot rolling of copper/silicon carbide composite thin films for microelectronic applications. Materials Science Forum, 2007, 534-536, pp.881-884. ⟨10.4028/www.scientific.net/MSF.534-536.881⟩. ⟨hal-00122590⟩