Resonance Frequency Tracking for MEMS Gyroscopes Using Recursive Identification

Federico Morelli (1) , Xavier Bombois (2, 1) , Cécile Pernin , Fabricio Saggin (1) , Anton Korniienko , Kévin Colin (3) , Laurent Bako (1)

1 AIS - Ampère, Département Automatique pour l'Ingénierie des Systèmes
2 CNRS - Centre National de la Recherche Scientifique
3 KTH - KTH Royal Institute of Technology [Stockholm]

MEMS gyroscopes are generally made up of two resonant systems: the so-called drive and sense modes. It is well known that the drive-mode resonance tracking is crucial to make the device operate accurately. In this paper, we propose an approach based on recursive identification that allows to estimate the resonance frequency over the time. The proposed approach pertains to a recently developed control conguration which is based on the H ∞ control framework.

Domaines: Automatique / Robotique

Federico Morelli, Xavier Bombois, Cécile Pernin, Fabricio Saggin, Anton Korniienko, et al.. Resonance Frequency Tracking for MEMS Gyroscopes Using Recursive Identification. 2021. ⟨hal-03344115v1⟩