Etching suspended superconducting hybrid junctions from a multilayer

Hung Q. Nguyen (1) , Laetitia Pascal (1) , Z. H. Peng (2) , Olivier Buisson (3) , B. Gilles (4) , Clemens Winkelmann (1) , Hervé Courtois (1)

1 CP
2 NEEL - Institut Néel
3 NEEL - QuantECA - Circuits électroniques quantiques Alpes
4 SIMaP - Science et Ingénierie des Matériaux et Procédés

A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.

Domaines: Supraconductivité [cond-mat.supr-con]

Hung Q. Nguyen, Laetitia Pascal, Z. H. Peng, Olivier Buisson, B. Gilles, et al.. Etching suspended superconducting hybrid junctions from a multilayer. 2011. ⟨hal-00641292v1⟩