Etching suspended superconducting hybrid junctions from a multilayer

Hung Q. Nguyen (1) , Laëtitia Pascal (1) , Zhihui Peng (2) , Olivier Buisson (2) , B. Gilles (3) , Clemens Winkelmann (1) , Hervé Courtois (1)

1 NEEL - QuNES - Nano-Electronique Quantique et Spectroscopie
2 NEEL - QuantECA - Circuits électroniques quantiques Alpes
3 SIMaP - Science et Ingénierie des Matériaux et Procédés

A novel method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor - insulator - normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated.

Domaines: Supraconductivité [cond-mat.supr-con]

Hung Q. Nguyen, Laëtitia Pascal, Zhihui Peng, Olivier Buisson, B. Gilles, et al.. Etching suspended superconducting hybrid junctions from a multilayer. Applied Physics Letters, 2012, 100, pp.252602. ⟨10.1063/1.4729779⟩. ⟨hal-00641292v2⟩