FBAR Filters for Space Application Based on LiNbO3 Membrane
Résumé
Film bulk acoustic resonator (FBAR) usually use for filter application, can be used to address aerospace filter application which need large band. Then, it needs to use piezoelectric material with high electromechanical coupling coefficient. So we use LiNbO3 cut YXl/36 which have coupling coefficient for longitudinal mode of 37.5%.