MEMS Q-FACTOR ENHANCEMENT USING PARAMETRIC AMPLIFICATION: THEORETICAL STUDY AND DESIGN OF A PARAMETRIC DEVICE
Résumé
Parametric amplification is an interesting way of artificially increasing a MEMS Quality factor and could be helpful in many kinds of applications. This paper presents a theoretical study of this principle, based on Matlab/Simulink® simulations, and proposes design guidelines for parametric structures. A new device designed with this approach is presented together with the corresponding FEM simulation results.
Origine : Fichiers produits par l'(les) auteur(s)
Loading...