Studies of laser induced-MOCVD zinc oxide films

Z. Tan , P. Ren , W. Luo

Thin films of ZnO have been prepared by the double photobeams ultraviolet laser induced- metallorganic chemical vapour deposition (MOCVD) technique. The structure and transparent photoconductive property of these films are investigated by X-ray diffraction (XRD) , reflecting electron diffraction (RED), scanning electron microscopy (SEM) and ultraviolet visible absorption spectrometry (UV). The experiment shows that the technique produces superior quality films of polycrystal ZnO and possesses higher deposition rate, lower temperature of growth and far better transparent photoconductive property than those grown by the conventional CVD or MOCVD technique.

Domaines: Articles anciens

Z. Tan, P. Ren, W. Luo. Studies of laser induced-MOCVD zinc oxide films. Journal de Physique IV Proceedings, 1993, 03 (C3), pp.C3-261-C3-264. ⟨10.1051/jp4:1993335⟩. ⟨jpa-00251392⟩