Static response of miniature capacitive pressure sensors with square or rectangular silicon diaphragm
Résumé
The static response of capacitive pressure sensors with a thin rectangular or square diaphragm is studied, assuming small deflections. Lagrange's equation is solved from the virtual displacement theorem and an approximated polynomial solution. It is shown that response can be expressed under a normalized form dependent only on the value of the diaphragm dimension ratio. For a given silicon surface, square sensors exhibit the highest sensitivity whereas rectangular sensors have a more linear behaviour. Finally, the proposed formulation equally allows easy and rapid determination of the four geometric parameters defining this type of sensor.
Mots clés
electric sensing devices
elemental semiconductors
pressure measurement
silicon
square diaphragm
rectangular diaphragm
semiconductor
miniature capacitive pressure sensors
static response
Lagrange's equation
virtual displacement theorem
approximated polynomial solution
diaphragm dimension ratio
sensitivity
linear behaviour
geometric parameters
Si
Domaines
Articles anciens
Origine : Accord explicite pour ce dépôt
Loading...