BEAM INDUCED VARIATIONS OF GaAs CATHODOLUMINESCENCE : EFFECT OF HYDROGEN AND DEFORMATION

A. Djemel , J. Castaing , Jacques Chevallier

We use cathodoluminescence (CL) in a scanning electron microscope to study deep level recombination in semi-insulating GaAs. Two kinds of specimens were examined (i) as-grown crystals before and after hydrogenation, (ii) crystals deformed at high temperatures before and after hydrogenation. Hydrogen is introduced into the crystal using a R.F. hydrogen plasma (T = 240°C, t = 90 min.). A consequence of the introduction of hydrogen is a substantial increase of the light emitted under the electron beam, due to a passivation of deep level centers

Domaines: Articles anciens

A. Djemel, J. Castaing, Jacques Chevallier. BEAM INDUCED VARIATIONS OF GaAs CATHODOLUMINESCENCE : EFFECT OF HYDROGEN AND DEFORMATION. Journal de Physique Colloques, 1989, 50 (C6), pp.C6-178-C6-178. ⟨10.1051/jphyscol:1989632⟩. ⟨jpa-00229663⟩