THE EFFECTS OF IMAGE GAS ON ATOM PROBE ANALYSIS

M. Miller , K. Russell

The effects of image gas pressure on the performance of an energy-compensated atom probe have been investigated. The results indicate that the quantitative accuracy of the composition determinations is seriously degraded at gas pressures typically used during field-ion imaging. The mass resolution is degraded both in terms of the increase in the width of the peaks in the spectra and also in the number of ions in the tails of the peaks. The number of afterpulses is also increased.

Domaines: Articles anciens

M. Miller, K. Russell. THE EFFECTS OF IMAGE GAS ON ATOM PROBE ANALYSIS. Journal de Physique Colloques, 1988, 49 (C6), pp.C6-81-C6-86. ⟨10.1051/jphyscol:1988614⟩. ⟨jpa-00228111⟩