THIN FILM COMPOSITIONAL ANALYSIS BY LOW-ENERGY ELECTRON-INDUCED X-RAY SPECTROMETRY (LEEIXS). NEW APPLICATIONS

M. Romand , M. Charbonnier , F. Gaillard

Capabilities of low-energy electron-induced x-ray spectrometry for very thin film and light element analysis are illustrated. The analytical situations in LEEIXS and electron microprobe (EMP) are compared. A discussion of the physical concepts is included in order to provide a basis for interpretation of the results of present and futur investigations.

Domaines: Articles anciens

M. Romand, M. Charbonnier, F. Gaillard. THIN FILM COMPOSITIONAL ANALYSIS BY LOW-ENERGY ELECTRON-INDUCED X-RAY SPECTROMETRY (LEEIXS). NEW APPLICATIONS. Journal de Physique Colloques, 1987, 48 (C9), pp.C9-87-C9-90. ⟨10.1051/jphyscol:1987912⟩. ⟨jpa-00227228⟩