INFRARED VIBRATIONAL SPECTRA OF CHLORINATED AND HYDROGENATED AMORPHOUS SILICON

S. Kalem , Jacques Chevallier , S. Al Dallal , J. Bourneix

The infrared spectra of chlorinated and hydrogenated amorphous silicon have been measured. In addition to the hydrogen induced bands at 2110, 1990, 885, 840 and 640 cm-1, we observe two new modes at 545 cm-1 (Si-Cl stretching) and 500 cm-1 ( Si TO modes induced by chlorine). Observation of the 545 cm-1 band proves that chlorine acts as a dangling bond terminator. Upon annealing, some of the Si-Cl groups transform into SiCl4 molecules (SiCl4 stretching at 615 cm-1). A good agreement is found between the total amount of chlorine determined by electron microprobe analysis and the value estimated from the integrated strength of the Si-Cl stretching mode.

Domaines: Articles anciens

S. Kalem, Jacques Chevallier, S. Al Dallal, J. Bourneix. INFRARED VIBRATIONAL SPECTRA OF CHLORINATED AND HYDROGENATED AMORPHOUS SILICON. Journal de Physique Colloques, 1981, 42 (C4), pp.C4-361-C4-363. ⟨10.1051/jphyscol:1981477⟩. ⟨jpa-00220934⟩