Investigations on the properties of a two-dimensional nanopatterned metallic film

C. Breazu , N. Preda , M. Socol , F. Stanculescu , E. Matei (1) , I. Stavarache , G. Iordache , Mihaela Girtan (2) , O. Rasoga , A. Stanculescu

1 NIMP - National Institute of Materials Physics
2 LPHIA - Laboratoire de Photonique d'Angers

This paper presents some investigations of the effect of nanopatterning on the properties of aluminum layer deposited by sputtering. UV-Nanoimprint Lithography technique has been used for the realization of a 2D array of nanostructures (pillars) in aluminum film characterized by cylindrical shape and the following structural parameters: diameter between 400 nm and 490 nm, depth between 320 nm and 420 nm and periodicity of 1.1 μ m, which have been revealed by SEM and AFM measurements. The UV-Vis transmission, reflection and photoluminescence measurements have evidenced the effect of the nanopatterning on the optical properties of the Al layer. © 2016, Inst Materials Physics. All rights reserved.

Domaines: Physique [physics]

C. Breazu, N. Preda, M. Socol, F. Stanculescu, E. Matei, et al.. Investigations on the properties of a two-dimensional nanopatterned metallic film. Digest Journal of Nanomaterials and Biostructures, 2016, 11 (4), pp.1213-1229. ⟨hal-02443180⟩