WO 2017021660 A1 - METHOD AND DEVICE FOR QUANTIFYING THE TOTAL SILICON CONTENT DUE TO VOLATILE SILICON-CONTAINING ORGANIC COMPOUNDS PRESENT IN A GAS - Archive ouverte HAL Accéder directement au contenu
Brevet Année : 2017

WO 2017021660 A1 - METHOD AND DEVICE FOR QUANTIFYING THE TOTAL SILICON CONTENT DUE TO VOLATILE SILICON-CONTAINING ORGANIC COMPOUNDS PRESENT IN A GAS

PROCEDE ET DISPOSITIF DE QUANTIFICATION DU SILICIUM TOTAL ISSU DE COMPOSES ORGANIQUES VOLATILS SILICIES PRESENTS DANS UN GAZ

Nathalie Dumont
Charly Germain
  • Fonction : Auteur
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Dates et versions

hal-02055082 , version 1 (02-03-2019)

Identifiants

  • HAL Id : hal-02055082 , version 1

Citer

Vincent Chatain, Nathalie Dumont, Hélène Metivier-Pignon, Charly Germain. WO 2017021660 A1 - METHOD AND DEVICE FOR QUANTIFYING THE TOTAL SILICON CONTENT DUE TO VOLATILE SILICON-CONTAINING ORGANIC COMPOUNDS PRESENT IN A GAS. France, Patent n° : WO2017021660 A1. 2017. ⟨hal-02055082⟩
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