Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

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https://hal.archives-ouvertes.fr/hal-02017572
Contributor : Miguel Rubio-Roy <>
Submitted on : Wednesday, February 13, 2019 - 11:30:35 AM
Last modification on : Wednesday, February 13, 2019 - 11:30:35 AM

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  • HAL Id : hal-02017572, version 1

Citation

C. Corbella, Miguel Rubio-Roy, E. Bertran, S Portal, E Pascual, et al.. Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode. Plasma Sources Science and Technology, IOP Publishing, 2011, 20 (1), pp.015006. ⟨hal-02017572⟩

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