Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode

C. Corbella (1) , Miguel Rubio-Roy (1) , E. Bertran (1) , S Portal (1) , E Pascual (1) , M.C. Polo (1) , J. Andújar (1)

1 FEMAN - FEMAN

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Physique des plasmas [physics.plasm-ph]; Physique [physics]

C. Corbella, Miguel Rubio-Roy, E. Bertran, S Portal, E Pascual, et al.. Ion energy distributions in bipolar pulsed-dc discharges of methane measured at the biased cathode. Plasma Sources Science and Technology, 2011, 20 (1), pp.015006. ⟨hal-02017572⟩