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Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers

Abstract : The exceptional chemical, mechanical and thermal properties of diamond make this material the ideal choice for resonant MEMS. Cantilevers designed for biochemical applications have been fabricated using CVD diamond. In this work, the mechanical properties of these cantilevers were investigated by two different techniques: bending test using a Contact Surface Profilometer and resonant test, using a Laser Doppler Vibrometer. The Young's Modulus mean value of polycrystalline diamond cantilever was estimated from these tests at 950-1100GPa.
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Submitted on : Tuesday, October 9, 2018 - 11:58:48 PM
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Maira Possas, Lionel Rousseau, Farbod Ghassemi, Gaelle Bazin Lissorgues, Emmanuel Scorsone, et al.. Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers. 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Apr 2014, Cannes, France. ⟨10.1109/DTIP.2014.7056658⟩. ⟨hal-01891791⟩



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