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Monolithic silicon-micromachined free-space optical interferometers onchip

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https://hal.archives-ouvertes.fr/hal-01763660
Contributor : Tarik Bourouina <>
Submitted on : Wednesday, April 11, 2018 - 12:14:54 PM
Last modification on : Tuesday, June 2, 2020 - 7:36:03 AM

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Tarik Bourouina, Yasser Sabry, Diaa Khalil. Monolithic silicon-micromachined free-space optical interferometers onchip. Laser & Photonics Reviews, 2015, 9 (1), pp.1 - 24. ⟨10.1002/lpor.201400069⟩. ⟨hal-01763660⟩

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