Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings

Khalil Aouadi (1) , Corinne Nouveau (1) , Aurélien Besnard (1) , Brahim Tlili (2) , Moez Chafra (3)

1 LABOMAP - Laboratoire Bourguignon des Matériaux et Procédés
2 ENIT - Ecole Nationale d'Ingénieurs de Tunis
3 IPEST - Institut préparatoire aux études scientifiques et techniques [La Marsa]

Microstructure, wear and friction coefficient of cr-based magnetron sputtered layers. CrN films were deposited on stainless steel and silicon substrates via magnetron reactive sputtering under a systematic variation of the substrate bias voltage. The influence of the substrate bias voltage on the structural and tribological properties of the films was investigated. The results indicated that increasing the negative bias voltage have many influence on the characteristic of the coatings: concerning their microstructure, we observed that the grain size increased, while their coefficient of friction is influenced by the bias voltage like the wear rate.

Mots clés: Tribology; CrN; PVD

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matériaux; Mécanique [physics.med-ph]; Micro et nanotechnologies/Microélectronique

Khalil Aouadi, Corinne Nouveau, Aurélien Besnard, Brahim Tlili, Moez Chafra. Effect of substrate bias voltage on the microstructure and tribological properties of CrN coatings. Annales de Chimie - Science des Matériaux, 2016, 40 (1-2), pp.9-15. ⟨10.3166/acsm.40.9-15⟩. ⟨hal-01666604⟩