Krylov-Subspace-Based Order Reduction Methods Applied to Generate Compact- Electro-Thermal Models for MEMS

Tamara Bechtold (1) , Behnam Salimbahrami (2) , E.B Rudnyi (1) , Boris Lohmann (2) , Jan Gerrit Gerrit Korvink (1)

1 IMTEK - Department of Microsystems Engineering [Freiburg]
2 IAT - Institute of Automation - University of Bremen

The high power dissipation density in today's miniature electronic/mechanical systems makes on-chip thermal management crucial. In order to achieve quick-to-evaluate, yet accurate electro-thermal models, needed for the thermal management of microsystems, model order reduction is necessary. In this paper, we use Krylov-subspace methods for the order reduction of a electro-thermal MEMS model, illustrated by a novel type of micropropulsion device. Comparison between different moment-matching algorithms including a new two-sided Arnoldi algorithm, is performed .

Mots clés: compact thermo-electric model; order reduction; Krylov-subspace; Arnoldi process; Lanczos algorithm

Domaines: Mécanique des structures [physics.class-ph]; Micro et nanotechnologies/Microélectronique; Energie électrique

Tamara Bechtold, Behnam Salimbahrami, E.B Rudnyi, Boris Lohmann, Jan Gerrit Gerrit Korvink. Krylov-Subspace-Based Order Reduction Methods Applied to Generate Compact- Electro-Thermal Models for MEMS. NSTI Nanotechnology Conference & Trade Show Nanotech 2003, Jan 2003, San Francisco, United States. ⟨hal-01615922⟩