Assessment of candidate metallization systems deposited on diamond using nano-indentation and nano-scratching tests

Sabeur Msolli (1) , Joël Alexis (2) , Heung Soo Kim (1) , Olivier Dalverny (2) , Moussa Karama (2)

1 DU - Dongguk University
2 LGP - Laboratoire Génie de Production

Mechanical suitability of ohmic contacts among the select metallization systems, deposited on a p-type heavily boron-doped homoepitaxial diamond layer, was evaluated via mechanical tests on the nanoscale. Two candidate metallization systems were considered: Si/Al and Ti/Pt/Au. Metallizations were performed using two different techniques: plasma-enhanced chemical vapour deposition and “lift-off”. Effectiveness of the techniques was assessed via mechanical tests on the microscale and the nanoscale. Nano-indentation experiments were performed to determine the mechanical properties of the layers. Nano-scratching experiments were used to evaluate the mechanical adhesion on the diamond substrate. Scanning electron microscopy was applied for observation of the morphology of the surface and the indent and for detecting defects.

Mots clés: Diamond; Metallization; Deposition; Nano-indentation; Nano-scratching; Power electronics

Domaines: Micro et nanotechnologies/Microélectronique

Sabeur Msolli, Joël Alexis, Heung Soo Kim, Olivier Dalverny, Moussa Karama. Assessment of candidate metallization systems deposited on diamond using nano-indentation and nano-scratching tests. Thin Solid Films, 2016, vol. 619, pp. 53-60. ⟨10.1016/j.tsf.2016.10.022⟩. ⟨hal-01449172⟩