R. Soref, Mid-infrared photonics in silicon and germanium, Nature Photonics, vol.15, issue.8, p.495, 2010.
DOI : 10.1038/nphoton.2010.171

X. Wang, S. S. Kim, R. Roßbach, M. Jetter, P. Michler et al., Ultra-sensitive mid-infrared evanescent field sensors combining thin-film strip waveguides with quantum cascade lasers, The Analyst, vol.16, issue.10, p.2322, 2012.
DOI : 10.1039/c1an15787f

Y. Zou, S. Chakravarty, P. Wray, and R. T. Chen, Mid-infrared holey and slotted photonic crystal waveguides in silicon-on-sapphire for chemical warfare simulant detection, Sensors and Actuators B: Chemical, vol.221, p.1094, 2015.
DOI : 10.1016/j.snb.2015.07.061

M. Nedeljkovic, A. Z. Khokhar, Y. Hu, X. Chen, J. S. Penades et al., Silicon photonic devices and platforms for the mid-infrared, Optical Materials Express, vol.3, issue.9, p.1205, 2013.
DOI : 10.1364/OME.3.001205

L. Vivien and L. Pavesi, Handbook of silicon photonics, 2016.
DOI : 10.1201/b14668

B. Kuyken, X. Liu, R. M. Osgood, R. Baets, G. Roelkens et al., Mid-infrared to telecom-band supercontinuum generation in highly nonlinear silicon-on-insulator wire waveguides, Optics Express, vol.19, issue.21, p.20172, 2011.
DOI : 10.1364/OE.19.020172

S. Zlatanovic, J. S. Park, S. Moro, J. M. Boggio, I. B. Divliansky et al., Mid-infrared wavelength conversion in silicon waveguides using ultracompact telecom-band-derived pump source, Nature Photonics, vol.12, issue.8, p.561, 2010.
DOI : 10.1038/nphoton.2010.117

S. Khan, J. Chiles, J. Ma, and S. Fathpour, Silicon-on-nitride waveguides for mid- and near-infrared integrated photonics, Applied Physics Letters, vol.102, issue.12, p.121104, 2013.
DOI : 10.1063/1.4798557

G. Z. Mashanovich, M. M. Milo?evi?, M. Nedeljkovic, N. Owens, B. Xiong et al., Low loss silicon waveguides for the mid-infrared, Optics Express, vol.19, issue.8, p.7112, 2011.
DOI : 10.1364/OE.19.007112

P. T. Lin, V. Singh, Y. Cai, L. C. Kimerling, and A. Agarwal, Air-clad silicon pedestal structures for broadband mid-infrared microphotonics, Optics Letters, vol.38, issue.7, p.1031, 2013.
DOI : 10.1364/OL.38.001031

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, and J. Xu, High-responsivity graphene/silicon-heterostructure waveguide photodetectors, Nature Photonics, vol.23, issue.11, p.888, 2013.
DOI : 10.1038/nphoton.2013.241

J. Soler-penadés, A. Ortega-moñux, M. Nedeljkovic, J. G. Wangüemert-pérez, R. Halir et al., Suspended silicon mid-infrared waveguide devices with subwavelength grating metamaterial cladding, Optics Express, vol.24, issue.20, p.22908, 2016.
DOI : 10.1364/OE.24.022908

Y. C. Chang, V. Paeder, L. Hvozdara, J. M. Hartmann, and H. P. Herzig, Low-loss germanium strip waveguides on silicon for the mid-infrared, Optics Letters, vol.37, issue.14, p.2883, 2012.
DOI : 10.1364/OL.37.002883

A. Malik, M. Muneb, Y. Shimura, J. V. Campenhout, R. Loo et al., Germanium-on-Silicon Mid-Infrared Arrayed Waveguide Grating Multiplexers, IEEE Photonics Technology Letters, vol.25, issue.18, p.1805, 2013.
DOI : 10.1109/LPT.2013.2276479
URL : http://hdl.handle.net/1854/LU-4171490

P. Barritault, M. Brun, P. Labeye, J. Hartmann, F. Boulila et al., Design, fabrication and characterization of an AWG at 45 ??m, Optics Express, vol.23, issue.20, p.26168, 2015.
DOI : 10.1364/OE.23.026168

B. Troia, J. S. Penades, A. Z. Khokhar, M. Nedeljkovic, C. Alonso-ramos et al., Germanium-on-silicon Vernier-effect photonic microcavities for the mid-infrared, Optics Letters, vol.41, issue.3, p.610, 2016.
DOI : 10.1364/OL.41.000610

M. Brun, P. Labeye, G. Grand, J. M. Hartmann, F. Boulila et al., Low loss SiGe graded index waveguides for mid-IR applications, Optics Express, vol.22, issue.1, p.508, 2014.
DOI : 10.1364/OE.22.000508

L. Carletti, P. Ma, Y. Yu, B. Luther-davies, D. Hudson et al., Nonlinear optical response of low loss silicon germanium waveguides in the mid-infrared, Optics Express, vol.23, issue.7, p.8261, 2015.
DOI : 10.1364/OE.23.008261
URL : https://hal.archives-ouvertes.fr/hal-01489423

S. Marchionna, A. Virtuani, M. Acciarri, G. Isella, and H. , Defect imaging of SiGe strain relaxed buffers grown by LEPECVD, Materials Science in Semiconductor Processing, vol.9, issue.4-5, p.802, 2006.
DOI : 10.1016/j.mssp.2006.09.003

P. Chaisakul, D. Marris-morini, J. Frigerio, D. Chrastina, M. S. Rouifed et al., Integrated germanium optical interconnects on silicon substrates, Nature Photonics, vol.28, issue.6, p.482, 2014.
DOI : 10.1117/1.2113127

V. Vakarin, P. Chaisakul, J. Frigerio, A. Ballabio, X. Le-roux et al., Sharp bends and Mach-Zehnder interferometer based on Ge-rich-SiGe waveguides on SiGe graded buffer, Optics Express, vol.23, issue.24, p.30821, 2015.
DOI : 10.1364/OE.23.030821
URL : https://hal.archives-ouvertes.fr/hal-01246369

R. Soref, Mid-infrared photonics in silicon and germanium, Nature Photonics, vol.15, issue.8, p.495, 2010.
DOI : 10.1038/nphoton.2010.171

Y. C. Chang, P. Wägli, V. Paeder, A. Homsy, L. Hvozdara et al., Cocaine detection by a midinfrared waveguide integrated with a microfluidic chip, p.3020, 2012.
DOI : 10.1039/c2lc40601b
URL : http://infoscience.epfl.ch/record/181086

J. Haas and B. Mizaikoff, Advances in Mid-Infrared Spectroscopy for Chemical Analysis, Annual Review of Analytical Chemistry, vol.9, issue.1, p.9, 2016.
DOI : 10.1146/annurev-anchem-071015-041507

L. C. Hensley, A. Kimerling, and . Agarwal, Chip-scale Mid-Infrared chemical sensors using air-clad pedestal silicon waveguides, Lab on a Chip, vol.13, p.2161, 2013.

J. Hu, J. Meyer, K. Richardson, and L. Shah, Feature issue introduction: mid-IR photonic materials, Optical Materials Express, vol.3, issue.9, p.1571, 2013.
DOI : 10.1364/OME.3.001571

. Mashanovich, Silicon photonic devices and platforms for the mid-infrared, Optical Materials Express, vol.3, p.1205, 2013.

L. Vivien and L. Pavesi, Handbook of silicon photonics, 2016.
DOI : 10.1201/b14668

N. Singh, D. D. Hudson, Y. Yu, C. Grillet, S. D. Jackson et al., Midinfrared supercontinuum generation from 2 to 6 µm in a silicon nanowire, p.797, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01489439

R. T. Wray and . Chen, Grating-coupled silicon-on-saphire integrated slot waveguides operating at mid-infrared wavelengths, Optics Letters, vol.39, issue.10, pp.3070-3073, 2014.

X. Wang, Z. Cheng, K. Xu, H. K. Tsang, and J. Xu, High-responsivity graphene/silicon-heterostructure waveguide photodetectors, Nature Photonics, vol.23, issue.11, pp.888-891, 2013.
DOI : 10.1038/nphoton.2013.241

. Herzig, Low-loss germanium strip waveguides on silicon for the midinfrared, Optics letters, vol.37, p.2883, 2012.

A. Malik, M. Muneb, Y. Shimura, J. V. Campenhout, R. Loo et al., Germanium-on-silicon planar concave grating wavelength (de)multiplexers in the mid-infrared, Applied Physics Letters, vol.103, issue.16, pp.25-1805, 2013.
DOI : 10.1063/1.4826114

J. Lepage, W. Van-camperhout, T. Vanherle, R. Van-opstal, G. Loo et al., Ge-on-Si and Ge-on-SOI thermo-optic phase shifters for the midinfrared, Optics Express, vol.22, issue.23, pp.28479-28488, 2014.

P. Barritault, M. Brun, P. Labeye, J. Hartmann, F. Boulila et al., Design, fabrication and characterization of an AWG at 45 ??m, Optics Express, vol.23, issue.20, pp.26168-26181, 2015.
DOI : 10.1364/OE.23.026168

M. Nedeljkovic, J. Soler-penades, C. J. Mitchell, A. Z. Khokhar, S. Stankovic et al., Surface-Grating-Coupled Low-Loss Ge-on-Si Rib Waveguides and Multimode Interferometers, IEEE Photonics Technology Letters, vol.27, issue.10, pp.27-1040, 2015.
DOI : 10.1109/LPT.2015.2405611

B. Troia, J. Soler-penades, A. Z. Khokhar, M. Nedeljkovic, C. Alonso-ramos et al., Germanium-on-silicon Vernier-effect photon microcavities for the mid-infrared, Optics Letters, issue.3, pp.41-610, 2016.

J. Moss, C. Monat, and C. Grillet, Mid-infrared nonlinear optical response of Si-Ge waveguides with ultra-short optical pulses, Optics express, vol.23, p.32202, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01489438