Free-surface dynamics in the Ribbon Growth on Substrate (RGS) process

P Beckstein (1) , V Galindo (1) , G Gerbeth (1) , A Schönecker (2)

1 HZDR - Helmholtz-Zentrum Dresden-Rossendorf
2 RGS Development B.V.

The cost efficient, high throughput production of metal-and semiconductor alloys is the foundation of many advanced technologies. With the development of the Ribbon Growth on Substrate (RGS) technology, a new crystallization technique is available that allows the controlled, high crystallization rate production of silicon wafers and advanced metal-silicide alloys. Compared to other crystallization methods, such as melt spinning, the RGS process allows better crystallization control, high volume manufacturing and high material yield due to the substrate driven process. In order to optimize RGS further, insights from modelling the liquid metal in the casting frame under electromagnetic fields are very desirable. We performed numerical investigations in order to study the involved AC magnetic fields, which are an essential part of the RGS process to realize a magnetic retention effect. Our simulation results demonstrate the effect of the applied AC magnetic fields on the silicon melt flow. The main focus is thereby devoted to the simulation of the melt surface deformation based on a complex modelling approach. This time-dependent free-surface flow under the influence of magnetic forces is the key for optimizing the RGS process.

Mots clés: Ribbon Growth on Substrate; Semi-conductor processing; AC magnetic fields; Magnetic retention; OpenFOAM extensions; COMSOL Multiphysics; Moving mesh; Surface-tracking; Free-surface; Dome-shaping

Domaines: Sciences de l'ingénieur [physics]

P Beckstein, V Galindo, G Gerbeth, A Schönecker. Free-surface dynamics in the Ribbon Growth on Substrate (RGS) process. 8th International Conference on Electromagnetic Processing of Materials, Oct 2015, Cannes, France. ⟨hal-01333503⟩