Correlation between electric-field-induced phase transition and piezoelectricity in lead zirconate titanate films

V Kovacova (1) , N Vaxelaire (1) , G Le Rhun (1) , P Gergaud (1) , T Schmitz-Kempen (2) , E Defay (3)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 aixACCT Systems GmbH
3 Centre de Recherche Public Gabriel Lippmann, Dept. Sci. & Anal. Mat

We observed that electric field induces phase transition from tetragonal to rhombohedral in polycrystalline morphotropic lead zirconate titanate (PZT) films, as reported in 2011 for bulk PZT. Moreover, we evidenced that this field-induced phase transition is strongly correlated with PZT film piezoelectric properties, that is to say the larger the phase transition, the larger the longitudinal piezoelectric coefficient d 33,eff . Although d 33,eff is already comprised between as 150 to 170 pm/V, our observation suggests that one could obtain larger d 33,eff values, namely 250 pm/V, by optimizing the field-induced phase transition thanks to composition fine tuning.

Mots clés: phase transition; PZT thin films; XRD in situ

Domaines: Micro et nanotechnologies/Microélectronique; Matériaux; Physique des Hautes Energies - Expérience [hep-ex]; Science des matériaux [cond-mat.mtrl-sci]

V Kovacova, N Vaxelaire, G Le Rhun, P Gergaud, T Schmitz-Kempen, et al.. Correlation between electric-field-induced phase transition and piezoelectricity in lead zirconate titanate films. Physical Review B: Condensed Matter and Materials Physics (1998-2015), 2014, 90, pp.140101. ⟨10.1103/PhysRevB.90.140101⟩. ⟨hal-01081720⟩