Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction

Hui Liu (1) , Jonathan Bailleul (1) , Bertrand Simon (1) , Matthieu Debailleul (1) , Bruno Colicchio (1) , Olivier Haeberlé (1)

1 MIPS - Modélisation, Intelligence, Processus et Système

We have developed a tomographic diffractive microscope in reflection, which permits observation of sample surfaces with an improved lateral resolution, compared to a conventional holographic microscope. From the same set of data, high-precision measurements can be performed on the shape of the reflective surface by reconstructing the phase of the diffracted field. Doing so allows for several advantages compared to classical holographic interferometric measurements: improvement in lateral resolution, easier phase unwrapping, reduction of the coherent noise, combined with the high-longitudinal precision provided by interferometric phase measurements. We demonstrate these capabilities by imaging various test samples.

Mots clés: Holography; Aberration compensation; Superresolution; Tomographic imaging; Fourier optics and signal processing

Domaines: Traitement du signal et de l'image [eess.SP]; Traitement du signal et de l'image [eess.SP]

Hui Liu, Jonathan Bailleul, Bertrand Simon, Matthieu Debailleul, Bruno Colicchio, et al.. Tomographic diffractive microscopy and multiview profilometry with flexible aberration correction. Applied optics, 2013, 53 (4), pp.748-755. ⟨10.1364/AO.53.000748⟩. ⟨hal-00998064⟩