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Characterization and post simulation of thin-film PZT actuated plates for haptic applications

Abstract : The tremendous development of tactile interface in many customers' applications such as Smartphone, tablet PC or touch pad leads industrials to study "haptic interfaces" or "touch screen" solutions. This technology is already used but with limitations such as high power consumption and limited feedback effect (simple vibration). PZT is a good candidate for many actuator applications due to its high piezoelectric coefficient. In particular, it can be used for haptic interfaces to create squeeze-film effect. It consists in changing the friction between the finger and a plate resonator. It provides high granularity level of haptic sensation (texture rendering), using low power consumption compared to existing solutions. We manufactured demonstrators using a generic technology. We proved the concept through electro-mechanical characterizations and haptic feedback effect was noticeable with one's finger on our thin-film PZT demonstrators. In this paper, we presented the characterization and post-simulation of PZT-actuated plates with various actuator configurations. Measurement results, in good agreement with simulation, indicate that 2 actuator columns separated by a wavelength allow obtaining the highest substrate displacement amplitudes.
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Submitted on : Monday, May 19, 2014 - 10:11:07 AM
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F. Casset, J.S. Danel, P. Renaux, C. Chappaz, G. Le Rhun, et al.. Characterization and post simulation of thin-film PZT actuated plates for haptic applications. 15th IEEE International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2014, 2014, Ghent, Belgium. 4 p., ⟨10.1109/EuroSimE.2014.6813769⟩. ⟨hal-00992630⟩



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