M. Bader, R. Hall, and G. Strasser, Integrated processing equipment, Solid State Technol, vol.33, issue.5, pp.149-154, 1990.

P. Burggraaf, Coping with the high cost of wafer fabs, Semicond. Int, vol.18, issue.38, pp.45-50, 1995.

S. Ding, J. Yi, and M. Zhang, Multicluster Tools Scheduling: An Integrated Event Graph and Network Model Approach, IEEE Transactions on Semiconductor Manufacturing, vol.19, issue.3, pp.339-351, 2006.
DOI : 10.1109/TSM.2006.879414

J. Kim, T. Lee, H. Lee, and D. Park, Scheduling analysis of time-constrained dual-armed cluster tools, IEEE Transactions on Semiconductor Manufacturing, vol.16, issue.3, pp.521-534, 2003.
DOI : 10.1109/TSM.2003.815203

H. Lee and T. Lee, Scheduling Single-Armed Cluster Tools With Reentrant Wafer Flows, IEEE Transactions on Semiconductor Manufacturing, vol.19, issue.2, pp.226-240, 2006.
DOI : 10.1109/TSM.2006.873402

T. Lee, H. Lee, and Y. Shin, Workload balancing and scheduling of a single-armed cluster tool, Proc. 5th APIEMS Conf, pp.1-15, 2004.

M. Lopez and S. Wood, Systems of multiple cluster tools: configuration, reliability, and performance, IEEE Transactions on Semiconductor Manufacturing, vol.16, issue.2, pp.170-178, 2003.
DOI : 10.1109/TSM.2003.810936

T. K. Mcnab, Cluster tools?Part 1: Emerging processes, Semicond. Int, vol.13, issue.9, pp.58-63, 1990.

T. Murata, Petri nets: Properties, analysis and applications, Proc. IEEE, pp.541-580, 1989.
DOI : 10.1109/5.24143

B. Newboe, Cluster tools: A process solution, Semicond. Int, vol.13, issue.8, pp.82-88, 1990.

T. L. Perkinson, P. K. Maclarty, R. S. Gyurcsik, R. K. Cavin, and . Iii, Single-wafer cluster tool performance: an analysis of throughput, IEEE Transactions on Semiconductor Manufacturing, vol.7, issue.3, pp.369-373, 1994.
DOI : 10.1109/66.311340

T. L. Perkinson, R. S. Gyurcsik, and P. K. Mclarty, Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput, IEEE Transactions on Semiconductor Manufacturing, vol.9, issue.3, pp.384-400, 1996.
DOI : 10.1109/66.536110

Y. Qiao, N. Q. Wu, and M. C. Zhou, Real-Time Scheduling of Single-Arm Cluster Tools Subject to Residency Time Constraints and Bounded Activity Time Variation, IEEE Transactions on Automation Science and Engineering, vol.9, issue.3, pp.564-577, 2012.
DOI : 10.1109/TASE.2012.2192476

Y. Shin, T. Lee, J. Kim, and H. Lee, Modeling and implementing a real-time scheduler for dual-armed cluster tools, Computers in Industry, vol.45, issue.1, pp.13-27, 2001.
DOI : 10.1016/S0166-3615(01)00078-1

P. Singer, The driving forces in cluster tool development, Semicond. Int, vol.18, issue.8, pp.113-118, 1995.

S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots, IEEE Transactions on Semiconductor Manufacturing, vol.10, issue.4, pp.418-424, 1997.
DOI : 10.1109/66.641483

N. Q. Wu, Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model, IEEE Trans. Syst., Man, Cybern. C, Appl. Rev, vol.29, issue.2, pp.192-204, 1999.

N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, Petri Net-Based Scheduling of Single-Arm Cluster Tools With Reentrant Atomic Layer Deposition Processes, IEEE Transactions on Automation Science and Engineering, vol.8, issue.1, pp.42-55, 2011.
DOI : 10.1109/TASE.2010.2046736
URL : https://hal.archives-ouvertes.fr/hal-00645145

N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy, 2011 IEEE International Conference on Robotics and Automation, pp.5499-5504, 2011.
DOI : 10.1109/ICRA.2011.5980119
URL : https://hal.archives-ouvertes.fr/hal-00653946

N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting, IEEE Transactions on Systems, Man, and Cybernetics: Systems, vol.43, issue.1, pp.196-207, 2013.
DOI : 10.1109/TSMCA.2012.2187890
URL : https://hal.archives-ouvertes.fr/hal-00735482

N. Q. Wu and M. C. Zhou, Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems, IEEE Transactions on Robotics and Automation, vol.17, issue.5, pp.658-669, 2001.
DOI : 10.1109/70.964666

N. Q. Wu and M. C. Zhou, Modeling and Deadlock Control of Automated Guided Vehicle Systems, IEEE/ASME Transactions on Mechatronics, vol.9, issue.1, pp.50-57, 2004.
DOI : 10.1109/TMECH.2004.823875

N. Q. Wu and M. C. Zhou, Modeling and Deadlock Avoidance of Automated Manufacturing Systems With Multiple Automated Guided Vehicles, IEEE Transactions on Systems, Man and Cybernetics, Part B (Cybernetics), vol.35, issue.6, pp.1193-1202, 2005.
DOI : 10.1109/TSMCB.2005.850141

N. Q. Wu and M. C. Zhou, Deadlock Resolution in Automated Manufacturing Systems With Robots, IEEE Transactions on Automation Science and Engineering, vol.4, issue.3, pp.474-480, 2007.
DOI : 10.1109/TASE.2006.888049

N. Q. Wu, M. C. Zhou, and Z. W. Li, Resource-oriented Petri net for deadlock avoidance in flexible assembly systems, IEEE Trans. Syst, vol.38, issue.1, pp.56-69, 2008.

N. Q. Wu and M. C. Zhou, System Modeling and Control With Resource- Oriented Petri Nets, 2009.

N. Q. Wu and M. C. Zhou, A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis, IEEE Trans. Autom. Sci. Eng, vol.7, issue.2, pp.303-315, 2010.

N. Q. Wu and M. C. Zhou, Process vs resource-oriented Petri net modeling of automated manufacturing systems, Asian Journal of Control, vol.39, issue.4, pp.267-280, 2010.
DOI : 10.1007/978-1-4615-3126-5

N. Q. Wu and M. C. Zhou, Colored timed Petri nets for modeling and analysis of cluser tools, Asian Journal of Control, vol.17, issue.5, pp.253-266, 2010.
DOI : 10.1002/asjc.183

N. Q. Wu and M. C. Zhou, Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation, IEEE Trans. Autom. Sci. Eng, vol.9, issue.1, pp.203-209, 2012.

N. Q. Wu and M. C. Zhou, Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets, IEEE Trans. Autom. Sci. Eng, vol.9, issue.2, pp.446-454, 2012.

J. Yi, S. Ding, D. Song, and M. Zhang, Steady-state throughput and scheduling analysis of multicluster tools: A decomposition approach, IEEE Trans. Autom. Sci. Eng, vol.5, issue.2, pp.321-336, 2008.

M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: Petri Net Approach, 1998.
DOI : 10.1142/3376
URL : https://www.worldscientific.com/doi/pdf/10.1142/9789812839763_fmatter

W. M. Zuberek, Timed Petri nets in modeling and analysis of cluster tools, IEEE Transactions on Robotics and Automation, vol.17, issue.5, pp.562-575, 2001.
DOI : 10.1109/70.964658

W. M. Zuberek, Cluster Tools With Chamber Revisiting???Modeling and Analysis Using Timed Petri Nets, IEEE Transactions on Semiconductor Manufacturing, vol.17, issue.3, pp.333-344, 2004.
DOI : 10.1109/TSM.2004.831524
URL : http://web.cs.mun.ca/~wlodek/pdf/04-IEEE-SMC.pdf

M. C. Zhou and F. Dicesare, Petri Net Synthesis for Discrete Event Control of Manufacturing Systems, 1993.
DOI : 10.1007/978-1-4615-3126-5

M. C. Zhou and M. D. Jeng, Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach, IEEE Transactions on Semiconductor Manufacturing, vol.11, issue.3, pp.333-357, 1998.
DOI : 10.1109/66.705370

R. Zurawski and M. C. Zhou, Petri nets and industrial applications: A tutorial, IEEE Transactions on Industrial Electronics, vol.41, issue.6, pp.567-583, 1994.
DOI : 10.1109/41.334574
URL : http://www.utdallas.edu/~htj041000/phd/PNs_and_Industrial_Applications.pdf